riancesof, and correlationsbetween,second-ordercoefficientsestimatedfrom

2factorial designrotatedthrough an angle

.

RUN

1

2

3

4

5

6

7

8

9

X1
EMITTER DOSE

6.3E15

1E16

6.3E15

1E16

1.2E16

5E15

7.9E15

7.9E15

7.9E15

X2
EMITTER ANNEALTIME

21

21

34

34

27

27

42

15

27

EMITTER RS

31.45

28.47

26.96

23.62

25.07

31.79

23.2

33.52

27.0

RUN

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

SubsDose

(–)

(+)

(–)

(+)

(–)

(+)

(–)

(+)

(+1.682)

(–1.682)

(0)

(0)

(0)

(0)

(0)

P–wellDose

(–)

(–)

(+)

(+)

(–)

(–)

(+)

(+)

(0)

(0)

(+1.682)

(–1.682)

(0)

(0)

(0)

Blkt Dose

(–)

(–)

(–)

(–)

(+)

(+)

(+)

(+)

(0)

(0)

(0)

(0)

(+1.682)

(–1.682)

(0)

Vtn (mV)

429

342

833

776

609

537

962

910

523

669

1037

369

860

569

644